俊尚科技提供各式高性能真空閥門,從隔離腔體的閘閥(gate valve)、便於傳輸大型基板的板閥(slit valve)或是安裝在真空幫浦抽氣處控制排氣量的鐘擺閥(penduroll valve)等,可滿足從低真空到超高真空系統、從小型研發機台到大量產機台上各式需要用到閥門的場合。各型閥門的特色請參考下列內容:

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Gate Valve
For Semiconductor Process

  • Leak Rate:
    • Body: 4.0x10-11 (pa*m3/s)
    • Gate: 1.3x10-10 (pa*m3/s)
  • Operating Temperature:
    • Body & Gate: 90
    • Actuator: 60
  • Opening/Closing Time: 1.0~3.0 sec
  • Service Life: 1 million cycles
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Silt Valve
For Roll-to-Roll Process

  • Slit Width: 250mm ~ 2000mm
  • Film Thickness: Max. 200μm
  • Customization: Yes
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Penduroll Valve
For 3-position APC

  • Leak Rate:
    • Body: 4.0x10-11 (pa*m3/s)
    • Gate: 1.3x10-10 (pa*m3/s)
  • Operating Temperature:
    • Body & Gate: 90
    • Actuator: 60
  • Operating Air Pressure: 0.5Mpa
  • Service Life: 200,000 cycles
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Throttle Valve
For Simple Pressure Controlling

  • Body Size ID: 6" through 35"
  • Flange Type: JIS, ISO, CF, of ASA
  • Flange Material: Aluminum or Stainless Steel
  • Vane Dirver: Servomotor, On-board controller, Pneumatic or none
  • UHV option available on CF flange mounted valve with ferrofludic feedthrough