俊尚科技提供各式高性能真空閥門，從隔離腔體的閘閥（gate valve）、便於傳輸大型基板的板閥（slit valve）或是安裝在真空幫浦抽氣處控制排氣量的鐘擺閥（penduroll valve）等，可滿足從低真空到超高真空系統、從小型研發機台到大量產機台上各式需要用到閥門的場合。各型閥門的特色請參考下列內容：

Gate Valve
For Semiconductor Process

• Leak Rate:
  • Body: 4.0x10^-11 (pa*m³/s)
  • Gate: 1.3x10^-10 (pa*m³/s)
• Operating Temperature:
  • Body & Gate: 90℃
  • Actuator: 60℃
• Opening/Closing Time: 1.0~3.0 sec
• Service Life: 1 million cycles

Silt Valve
For Roll-to-Roll Process

• Slit Width: 250mm ~ 2000mm
• Film Thickness: Max. 200μm
• Customization: Yes

Penduroll Valve
For 3-position APC

• Leak Rate:
  • Body: 4.0x10^-11 (pa*m³/s)
  • Gate: 1.3x10^-10 (pa*m³/s)
• Operating Temperature:
  • Body & Gate: 90℃
  • Actuator: 60℃
• Operating Air Pressure: 0.5Mpa
• Service Life: 200,000 cycles

Throttle Valve
For Simple Pressure Controlling

• Body Size ID: 6" through 35"
• Flange Type: JIS, ISO, CF, of ASA
• Flange Material: Aluminum or Stainless Steel
• Vane Dirver: Servomotor, On-board controller, Pneumatic or none
• UHV option available on CF flange mounted valve with ferrofludic feedthrough