電子鎗鍍膜技術廣泛應用於化合物半導體（compound semiconductors，例如：GaAs、GaN、SiC等）、發光二極體（LED）、鏡片（Ophthalmic Lens）、精密光學（Precision Optics）等領域。Temescal 從1952年成立至今，是一家專注於電子鎗鍍膜技術的領導者，致力於提供客戶完整的電子束蒸鍍技術方案，包含電子鎗專用的固態電源供應器、高效能電子鎗到 EBC 電子鎗控制器（集結 e-gun 輸出控制、indexer 坩堝槽位控制、sweep 電子束掃描、安全互鎖等功能於一體）。全系列多樣化的產品讓客戶可依照預算與需求來選擇最適合的產品組合，優異產品性能更是受到業界肯定，可滿足客戶在研究或量產最嚴苛的需求。
俊尚科技自1992年開始代理 Temescal 系列產品，至今已累積超過 25 年的電子鎗相關產品銷售與維修經驗，我們同時提供原廠硬體 / 製程技術的諮詢服務，這讓我們成為客戶最有力的後勤支援。客戶買的不只是性能優異的產品，更包含我們團隊所提供的高品質服務。Temescal & FerroTec 電子鎗相關產品的介紹請參考下列內容。
電子鎗電源供應器
The Temescal Model CV-6SLX is a 6-kW, constant voltage switching power supply designed to power and control a single electron beam source.
The Temescal Model CV-12SLX is a 12-kW, constant-voltage switching power supply designed to power and control a single electron beam source.
The Carrera series of power supplies uses primary switched mode technology to offer high efficiency and fast arc detection and recovery in a compact unit. Based on a modular design, the Carrera can be configured for maximum outputs ranging from 3kW to 12kW.
電子鎗
- Easily removable/replaceable top plate and crucible
- Side or bottom drive
- Multipocket crucibles are available in numerous configurations
- Smaller crucibles are offered for the 1CK gun in 4x7cc and 6x4cc pocket configurations
- Power ratings: 1-12 kW (Model 3CK), 1-10 kW (Model 2CK) and 1-8 kW (Model 1CK)
- Enhanced crucible cooling improves thermal stability during evaporation
- Ultra-stable magnetics eliminate the need to regauss magnetic parts following source disassembly
- Adjustable internal and external polepiece extensions optimize beam spot control
The EV M-6 and M-8 are professional multi-hearth sources for optical and other high precision applications. The EV M-6 has a maximum power of 6 kW and the EV M-8 can be used at powers of up to 10 kW.
These evaporators offer a small beam spot regardless of position in the pocket and extremely homogenous material depletion. This makes them ideal for precision applications such as optical coating.
- Movable crucible cover, which rises before crucible is rotated
- Pneumatically driven, low-impact cover motion
- Lip of cover recessed around exposed pocket
- Raised structures on underside of cover interlock with crucible web walls
- Virtual elimination of cross-contamination
- Minimal deposition on web walls and on cover margins around exposed pocket
- Enhanced crucible cooling improves thermal stability during evaporation
- Adjustable internal and external pole piece extensions optimize beam spot control, regardless of beam position
- Ultra-stable magnetics eliminate the need to regauss magnetic parts following source disassembly
- Power ratings: 1-10 kW (Model 2PT) and 1-12 kW (Model 3PT)
多功能電子鎗控制器
With the EBC controller you can consolidate components, reduce costs and simplify management of common functionality though a unified interface.
- Integrated Controller
E-Beam, HV, Sweep, Turret - Simplified Operator Interface
- Lower Your Component Cost
- Simplify Your System Wiring
- OEM ready
The Genius, when used with a Carrera series power supply, allows up to three electron beam sources to be run from a single power supply.
- Integrated Controller
E-Beam, HV, Sweep, Turret - Simplified Operator Interface
- Lower Your Component Cost
- Simplify Your System Wiring
- OEM ready