法國 Sairem 在微波電源、微波電漿源、微波周邊硬體的生產製造已經有超過 40 年的深厚經驗，服務客戶遍及科學研究與工業界不同的領域，其中在材料研發（以微波電漿沈積鑽石薄膜、表面處理、表面改質）、萃取（以微波用於天然物成分萃取或超微量分析時的材料消化作業）、加熱（以微波針對晶圓等精密產品進行均勻加熱）、食品處理（消毒、滅菌）等領域的表現深獲業界肯定。俊尚科技導入 Sairem 全系列微波產品，若客戶需要 915 MHz、2.45GHz、14 GHz、18GHz、28 GHz等不同頻率或不同功率之微波電源，歡迎與我們聯繫。
G4 Microwave Generators for Dry Etching & Lab-Grown Diamonds
Our latest generation (G4) of Microwave generators (at 2.45GHz, 3kW, 6kW and 10kW) has been specially designed with the Semiconductor (Dry Etching) Industry & Lab Grow Diamonds Industry in mind. The 100 % digital architecture makes it a modern and highly reliable product, with smart power control.
The solution is made of 2 modules for power supply and microwave generation. It can be adapted to most Dry Etching / CVD reactors. This equipment has been specially developed to support weeks long running cycle and deliver a narrow spectrum, necessary to offer the purest diamonds.
Multiple features, like de Automatic Restart Function (ARF), and Preventive Alarm Management (PAM, alarms without stopping the production) are implemented to allow you to go to the end of your production batch, even in case of micro power-cuts.
SAIREM’s optimized power supply and magnetron performances helps you to reduce process interruption and costly yield losses. Finally, SAIREM’s comprehensive customer service helps you to maximize your production yield, through support and advices.
Solid-State Microwave Generators for ECR Applications
The solid-state microwave power generators (SSPG) are the next revolution in the microwave technology field. Since the outset, our solid state generators at 2.45 GHz 200W & 400W have been designed with precision applications in mind:
- Medical devices which require a stable and narrow microwave signal
- Plasma generators with independently controlled plasma sources
- Sensitive low pressure surface treatment (PECVD) applications
Our solid-state generators have several patented features which make them both unique and the most advanced in the market. For example our auto-tune algorithm (patent WO/2012/146870) automatically controls the frequency in order to minimize the reflected power.
Another groundbreaking feature is the combination technology (patent WO/2019/224481 ) which allows us to build the most compact solid-state generators on the market.
Industrial Microwave Generators for Heating and Thawing
Microwave generators are used to create microwave energy. This energy is then used in many ways, sectors, and for different purposes, such as food processing, surface treatment, science…. Most of the time, microwaves are used in thermal processes for their ability to heat. Our microwave generators are available at all powers (ranging from 2kW to 600kW) and wide frquencies (ranging from 915MHz to 18GHz) and their characteristics can be customized to your needs. Please contact us for more information.