真空計是量測真空系統內部壓力(真空度)的設備,其量測精準度對於光電、半導體等精密製程極為重要。俊尚科技銷售之 MKS Granville-Phillips® 真空計深獲業界認可,全系列產品包含 Granville-Phillips® 各款真空感測頭與真空控制器,可滿足客戶的各種要求。以下將以不同真空度為區隔,依序介紹相關產品。
低真空計(1000 to 1x10E-4 Torr)
Model Number: 275
- Gaugue Type:
Sensor with electronics - Measurement Range:
1x10-4 to 1000 Torr
Model Number: APG
- Gaugue Type:
Sensor without integrated electronics for display - Measurement Range:
ATM ~ 1x10-4 mbar
Model Number: TTR911N
- Gaugue Type:
Sensor with electronics - Measurement Range:
1x10-4 to 1000 Torr
高真空/超高真空計(1x10E-4 to 1x10E-11 Torr)
Model Number: 354
- Hot cathode with electronics
- Direct readout
- Anti-RF design with CE compliance
- Measurement Range:
1x10-9 Torr
Model Number: AIM
- Cold cathode with electronics
- Measurement Range:
1.0x10-9~1.0x10-2 mbar
Model Number: 350
- Controller only
- To be used with nude BA UHV gauge
- RS232/RS485 Interface
- Measurement Range:
< 2x10-11 Torr
全領域真空計(ATM to 1x10E-11 Torr)
Model Number: 392
- Sensor head with electronics
- Direct readout
- Dual filaments design
- Measurement Range:
ATM to 1x10-9 Torr
Model Number: 307
- BA vacuum controller
- Readout for 3 input signals
- Continuous gauge operation
- Measurement Range:
ATM to 2x10-11 Torr
Model Number: TIC
- RS232 interface
- Windows-based software for full remote setup and datalogging
Model Number: 358
- Vacuum controller
- 6-relay set points
- Rack-mount design
- Measurement Range:
ATM to 3x10-10 Torr