真空計是量測真空系統內部壓力(真空度)的設備,其量測精準度對於光電、半導體等精密製程極為重要。俊尚科技銷售之 MKS Granville-Phillips® 真空計深獲業界認可,全系理產品包含 Granville-Phillips® 各款真空感測頭與真空控制器,可滿足客戶的各種要求。以下將以不同真空度為區隔,依序介紹相關產品。

低真空計(1000 to 1x10E-4 Torr)

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Model Number: 275

  • Gaugue Type:
    Sensor with electronics
  • Measurement Range:
    1x10-4 to 1000 Torr
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Model Number: APG

  • Gaugue Type:
    Sensor without integrated electronics for display
  • Measurement Range:
    ATM ~ 1x10-4 mbar
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Model Number: TTR911N

  • Gaugue Type:
    Sensor with electronics
  • Measurement Range:
    1x10-4 to 1000 Torr

高真空/超高真空計(1x10E-4 to 1x10E-11 Torr)

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Model Number: 354

  • Hot cathode with electronics
    • Direct readout
    • Anti-RF design with CE compliance
  • Measurement Range:
    1x10-9 Torr
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Model Number: AIM

  • Cold cathode with electronics
  • Measurement Range:
    1.0x10-9~1.0x10-2 mbar
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Model Number: 350

  • Controller only
    • To be used with nude BA UHV gauge
    • RS232/RS485 Interface
  • Measurement Range:
    < 2x10-11 Torr

全領域真空計(ATM to 1x10E-11 Torr)

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Model Number: 392

  • Sensor head with electronics
    • Direct readout
    • Dual filaments design
  • Measurement Range:
    ATM to 1x10-9 Torr
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Model Number: 307

  • BA vacuum controller
    • Readout for 3 input signals
    • Continuous gauge operation
  • Measurement Range:
    ATM to 2x10-11 Torr
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Model Number: TIC

  • RS232 interface
  • Windows-based software for full remote setup and datalogging
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Model Number: 358

  • Vacuum controller
    • 6-relay set points
    • Rack-mount design
  • Measurement Range:
    ATM to 3x10-10 Torr