俊尚科技提供各式高性能真空閥門，可滿足從低真空到超高真空系統、從小型研發機台到大量產機台上各式需要用到閥門的場合，相關資料請參考下列內容。

Spec	Gate Valve	Throttle valve	Slit Valve	Angle valve
Apperance
General Info	For the Isolation between pump and vacuum chamber. Having different options: HV / UHV compatible; nanual / pneumatic operation mode	For chamber pressure control Applications: sputtering / plasma-related process	For substrate transfer between chambers	For different chamber configuration