真空計 Vacuum Gauges

真空計是量測真空系統內部壓力（真空度）的設備，其量測精準度對於光電、半導體等精密製程極為重要。俊尚科技代理之 MKS Granville-Phillips® 真空計深獲業界認可，全系理產品包含 Granville-Phillips® 各款真空感測頭與真空控制器，可滿足客戶的各種要求。以下將以不同真空度為區隔，依序介紹相關產品。

低真空壓力量測

Spec	275	475	TTR911 N
Appearance
Equipment Type	Modual: sensor+electronic	Electronic only. To be used with Convectron gauge	Modual: sensor+electronic
Measurement Range	1x10^-4 to 1000 Torr	1x10^-4 to 1000 Torr	1x10^-4 to 1000 Torr

高真空壓力量測

Spec

354 Hot Cathode Gauge

350 Cold Cathode Gauge

350 Vacuum Controller

Appearance

Equipment Type

Hot Cathode Gauge + electronics

Direct readout
Anti-RF design with CE compliance

Cold Cathode Gauge + electronics

Direct readout
Time setting for scheduling maintenance

Electronic only

To be used with high vacuum gauge
RS232 / RS485 interface

Measurement Range

10^-9 Torr

10^-10Torr

< 2 x 10^-11 Torr

全領域壓力量測

Spec	392 wide-range	307 BA Vacuum Controller	370 SI Vacuum Controller	358 Vacuum Controller
Appearance
Equipment Type	Sensor head + electronics Direct readout Dual filament design	Electronics only Readout for 3 input signals Continuous gauge operation	Electronics only NIST certified Rack-mount design	Electronics only 6 relay set points Rack-mount design
Measurement Range	1 x 10^-9 Torr to ATM	2 x 10^-11 Torr to ATM	2 x 10^-11 Torr to ATM	3 x 10^-10 Torr to ATM

Spec

392 wide-range

307 BA Vacuum Controller

370 SI Vacuum Controller

358 Vacuum Controller

Appearance

Equipment Type

Sensor head + electronics

Direct readout
Dual filament design

Electronics only

Readout for 3 input signals
Continuous gauge operation

Electronics only

NIST certified
Rack-mount design

Electronics only

6 relay set points
Rack-mount design

Measurement Range

1 x 10^-9 Torr to ATM

2 x 10^-11 Torr to ATM

3 x 10^-10 Torr to ATM

標籤: Vacuum gauge