微波電漿源 Microwave Plasma Source
一般微波電漿的產生多使用915MHz或2.45GHz兩種頻率的微波電源,透過磁控管(Magnetron)產生微波源,並以導波管(Wave Guide)傳送特定震盪模式的微波,最後再透過石英視窗導入到真空腔體中產生電漿。傳統微波電漿系統的設計需優化均勻的氣體分佈及共振腔設計,才能產生大面積且均勻的高密度微波電漿。
新一代微波電漿源則採同軸電子迴旋(electron cyclotron resonance,ECR)設計,並搭配 solid-state 微波電源,可省卻掉傳統的磁控管及導波管,因此在硬體的架構更為精簡;此外,solid-state 微波電源可更精確地控制電源頻率,因此特別適用在需要穩定的精密製程中。近年來微波電漿技術廣泛用於薄膜沉積、表面科學、生醫及材料科學研究。俊尚提供下列各款微波電漿源供您選用:
Surface Wave Plasma Source
什麼是表面波電漿?表面波電漿的優點為何?
- 在施加微波時,電漿生成於電漿源中的介電材質管柱中
- 在施加微波時,微波的電磁場會沿電漿與介電材質管柱間的介面做縱向傳播(此時電漿彷彿是導體般),離微波電磁場生成區越遠、微波的能量被逐漸吸收
- 從橫截面上來看,微波能量於表層區快速衰減
- 表面波電漿的優點在於不需要在電漿源內設置電極(可減少污染)、氣體壓力區間寬(1x10-4 Torr 到大氣)、頻率範圍廣(27MHz ~ 10GHz)
我們提供DOWNSTREAM、SURFAGUIDE、S-WAVE等三款表面波電漿源供用戶選用,請參考下列資訊:
DOWNSTREAM 系列
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Pressure range | 10-2 mbar to atmospheric pressure |
Input gas | Ar, N2, O2, H2, He, air .... | |
Maximum power | 6.0 kW | |
Application | 創造自由基團、提升活性、表面活化、PECVD、氣化、減少氣體排放、滅菌、合成奈米粉末 |
Coaxial Plasma Source(ECR)
同軸式設計微波電漿源具備下列優點:
- 電漿密度高:採ECR式設計,氣體游離度高,電漿密度高
- 電漿源排列:可做任意分布(例如:矩陣、皇冠型、六角形、直線等),沒有數量或尺寸限制
- SAIREM專利WO2012 / 146870,可自動變頻調節阻抗
- 每個電漿子源皆獨立連接至 solid-state 微波電源供應器,輸出功率可從0W到200W
- 無論電漿源的數目有多少,皆可精確地由自動控制微波功率送電漿源
- 無電極設計:樣品獨立,可在基座施加偏壓
依據製程真空壓力與電漿密度,我們提供Aura-Wave以及Hi-Wave兩款同軸式微波電漿源供用戶選用,請參考下列資訊:
Aura-Wave 系列
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Pressure range | 10-4 mbar ~ 10-2 mbar |
Input gas | Ar, N2, O2, CH4, He, air ... | |
Plasma density | > 1011 cm-3 at 10 cm from sources in multisource configuration | |
Application | Creation of radicals, surface activation, PECVD, etching, surface treatment, sterilization via reactive species / UV / ionic bombardment |
Hi-Wave 系列
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Pressure range | 10-2 mbar ~ a few 10-1 mbar |
Input gas | Ar, N2, O2, CH4, He, air ... | |
Plasma density | > 1012 cm-3 at 10 cm from sources in multisource configuration | |
Application | Creation of radicals, reactive species, PECVD, nanocrystalline diamond, surface treatment e.g. nitruration, cleaning..., etching, sterilization |
Microwave Leakage Meter
2.54GHz手持式偵測器
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REF | IFP |
Frequency | 2450 MHz | |
Graduation | 0 to 5 mW/cm2 | |
Precision | 5% at full scale, 10% on linearity | |
Size | Detector 26mm x 72mm x 142mm | |
Total weight | 350g |
915Hz固定式偵測器
REF | DFM L24DC | |
Frequency | 915 MHz (integral band filter from 902 ~ 928 MHz) | |
Detection distance | Adjustable for a microwave leakage of 2.3 mW/cm2 at distance up to 20m; delivery preset 2.3 mW/cm2 at 5m. CE Directive 2004-40 states max. microwave leakage level of 23 W/m2, i.e. 2.3 mW/cm2 |
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Mains | 24 VDC, consumption 2 mA in stand-by mode, 50 mA in detection mode | |
Connectors | M12A, female 5 pins, for M12 standard cables, 5m standardd length (10m optional) 2 terminals for 24 VDC, 3 terminals to contact alarm |
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Contacts | 1 inverter, power cut-off 1 A at 24 VDC | |
Dimensions | 160 mm x 119 mm x 62 mm, weight 350g | |
Wall fixing | Base to fix on the wall with 2 screws (not provided); upper block mounts on the base through bayonet-type system. |