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法國 Sairem 在微波電源、微波電漿源、微波周邊硬體的生產製造已經有超過 40 年的深厚經驗,但也投入射頻電源與直流電源之研發與製造。濺鍍製程所需使用的直流電源供應器(DC Power Supply),其穩定性對於鍍膜品質影響非常大,理論上好的直流電源供應器應具備下列特點:具備恆定電壓輸出模式,供應的直流輸出電壓,不隨時間與負載而變動、穩壓率良好、低輸出雜訊、低輸出干擾、低輸出電壓漣波、可以充當偏壓使用。以下是 Sairem 的直流電源供應器產品資料,如需更詳細的資料,歡迎與我們聯繫!

The precise control of power, current and voltage of our DC power supplies make them perfectly adapted for small scale magnetron sputtering systems. Moreover, the integrated fast switch allow to biase 4 targets sequentially. Proprietary software and electronics allow for detection and removal of potential arcs.

 Finally, the front panel, equipped with a screen and a selection wheel, allows quick and easy control of all generator functions.

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Model Number: ALP750

  • Switch-mode >90%
  • Output Power: 750W
  • Ripple: <0.5% @ 10%~100% Max Power
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Model Number: ALP1500

  • Switch-mode >90%
  • Output Power: 1500W
  • Ripple: <2% @ 10%~100% Max Power