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NovaFabrica 是來自立陶宛專業電漿光譜分析儀(Plasma Emission Monitor,PEM)製造商,旗下各款 FloTron 是具備即時監控功能的電漿光譜分析儀,可用於反應性磁控濺鍍、真空電弧、電子束蒸發、IBS、PECVD 及 PEALD 等製程,並可顯著改善這些製程中的鍍膜速率以及製程再現性,對於鍍膜品質及產能提升相當有幫助,是反應式電漿鍍膜應用中相當關鍵的零組件。以下是 NovaFabrica 各款PEM的產品資訊:

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Model Number: FloTron

  • Output Ports: 3, 5 & 9
    Depending on model
  • Optical Inputs: 
    • PMT + filter
    • Inputs: 3, 5 & 9
      Depending on model
  • Spectra Range: 200 - 900 nm
  • Spectra Resolution: 10 nm
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Model Number: FloTron X

  • Output Ports: 3, 5 & 9
    Depending on model
  • Optical Inputs: 
    • UV-VIS-NIR spectrometer (CCD)
    • Inputs: 1-3. Depending on model
  • Spectra Range: 190 - 850/1040 nm
  • Spectra Resolution: 1-6 nm
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Model Number: FloTron H

  • Output Ports: 3, 5 & 9
    Depending on model
  • Optical Inputs: 
    • PMT + filter & UV-VIS-NIR spectrometer (CCD)
    • Inputs: 1, 3 & 5. Hybrid, depending on model
  • Spectra Range: 190 - 850/1040 nm
  • Spectra Resolution: 1-6 nm
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Model Number: FloTron X HR

  • Output Ports: 5
  • Optical Inputs: 
    • UV-VIS-NIR spectrometer (CCD)
    • Inputs: 1
  • Spectra Range: 200 - 1100 nm
  • Spectra Resolution: 0.1-0.5 nm