Plasma Processing Systems

PlasGenie® series is a set of feature-packed plasma processing tools, enabling users to perform functions such as surface cleaning, surface activation, surface etching, plasma coating and even plasma immersion ion implantation (PIII). PlasGenie®  has been purposely designed to be equipped with an energy-concentrating plasma source, creating an area with high plasma density, which has been tested to be very effective in performing cleaning, activation etching and so on. Technical features include:

  • Durable SUS304 plasma chamber for most applications
  • Good plasma distribution uniformity with dia. 4" area
  • Adjustable T/S for fine-tuning energy intensity
  • Precise gas flow control by MFC
  • Full-color touch screen with intuitive GUI
  • Built-in safety interlocks to prevent maloperation