Microwave Plasma-assisted CVD

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Highly oriented diamond thin film using CYRANNUS systems

iPLAS is a Germany-based manufacturer, famous for their CYRANNUS microwave-assisted PECVD systems. The CYRANNUS PEVCD systems have been designed with iPLAS's ECR microwave plasma source, which ensures high plasma density for the process and adopts Sairem's industry-proven microwae generator, which guarantees stable performance throughout the process. With these features, CRYANNUS PECVD systems can be used in advanced applications such as UNCD (Ultrananocrystalline Diamond) deposition, technical diamond growth, adhesion improvement, selective etching, gas activation, abatement and so on. All CYRANNUS microwave-assisted PECVD systems are custom-designed using standard modules, please contact us for more information.

 

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Although there's no standard specification, below is a simplified guide whcih will help you better understand the key points in determining your specification.

Specification Description
Plasma Source
  • CYRANNUS® I at 6" or 10.5"
  • larger size on request
  • diameter of plasma chamber 6" or 10.5"
Microwave
  • 2.45 GHz / 6kW continuous wave
  • switch mode power supply
Tuner
  • automated EH tuning element controlled by PLC
  • different working modes for easy operation
Substrate Holder
  • heated or cooled substrate holder (optional)
  • prepared for bias (optional)
  • automated substrate positioning (optional)
Vacuum
  • chamber directly connected to plasma source
  • load lock door for substrate feeding
  • double step rotary vane pump with N2 bypass
  • pressure control
Process Gas
  • individual gas flow controller
  • gas shower inside plasma source
Automation
  • control system built of modular devices
  • PLC Simatic* S7
  • field bus Profibus*
  • process parameters displayed
  • input or change of process parameters on screen
  • different recipes can be stored in the PLC
  • process documentation module (optional)
Safety
  • multiple secured safety circuits
  • interlocks by hardware and PLC
  • CE conformity