Atomic Layer Deposition (ALD)



SVT Associates' NorthStar™ Atomic Layer Deposition (ALD) system is a versatile research deposition tool for thermal or energy enhanced ALD. With up to 8 precursor lines and a hot wall — cross flow deposition chamber, a wide range of applications may be performed from a single system. Sample introduction is rapid and convenient with a quick hatch or the optional load lock. The NorthStar ALD system can be interfaced with other deposition and metrology tools. Integration of in-situ metrology tools and the RoboALD software/system automation increases process reproducibility. SVTA is your source for cost effective atomic layer deposition equipment. Atomic Layer Deposition System Applications:


  • High-k Dielectrics
  •  Nanocoatings
  •  Surface Modification Layers
  •  Corrosion protection layers
  •  Moisture barrier layers
  •  Device Encapsulations
  •  MEMS
  •  Photonic Crystals