Vacuum Valve

Junsun provides several kinds of vacuum valves for you to choose, from gate valves, throttle valves, slit valves to angle valves. Plase contact us for more information.

 

SpecGate ValveThrottle ValveSlit ValveAngle Valve
Appearance direct linear gate valve Throttle Valve slit valve angle valve
General Info
  • For the Isolation between pump and vacuum chamber.
  • Having different options: HV / UHV compatible; manual / pneumatic operation mode
  • For chamber pressure control
  • Applications: sputtering / plasma-related process
  • For substrate transfer between chambers
  • For different chamber configuration