Junsun provides several kinds of vacuum valves for you to choose, from gate valves, throttle valves, slit valves to angle valves. Plase contact us for more information.

Spec	Gate Valve	Throttle Valve	Slit Valve	Angle Valve
Appearance
General Info	For the Isolation between pump and vacuum chamber. Having different options: HV / UHV compatible; manual / pneumatic operation mode	For chamber pressure control Applications: sputtering / plasma-related process	For substrate transfer between chambers	For different chamber configuration