Low Vacuum：mechanical rotary pump
The working principle of a mechanical rotary pump is using the mechanical rotor and stator to compress, isolate, transfer and discharge gases from a vacuum chamber or enclosed container so as to lower the pressure inside the chamber or container. During its operation, there's constant contact between rotor and sator, it is strongly recommended to use vacuum compatible lubricant to reduce wear and heat. The use of lubricant has the inherent risk of creating oil gas backstream and generating particles, which will contaminate vacuum system, therefore mechanical rotary pump is best for applications that don't require clean vacuum environment. The ultimate pressure of mechanical rotary pump is 10-4 Torr. We've selected some mechanical rotary pumps according to their pumping speed for your reference, please see below product information.
| Pumping Speed | Ultimate Pressure | Recommended Models |
|---|
| <100（L/min） |
≌3X10-3 Torr |
- Duo3 / Duo6
- RV3 / RV5
- GLD-040 / GLD-051X
|
| 100～250（L/min） |
≌3X10-3 Torr |
- Duo11
- RV8
- GLD-136 / GLD-136X
|
| 250～330（L/min） |
≌3X10-3 Torr |
- PZ-16
- RV12
- GLD-201 / GLD-208 / VDN151
|
| 330～400（L/min） |
≌3X10-3 Torr |
|
| 400～600（L/min） |
≌3X10-3 Torr |
|
| 600～1000（L/min） |
≌3X10-3 Torr |
|
| 1000～2000（L/min） |
≌3X10-3 Torr |
- PZ65
- E2M80
- VDN601 / VDN901
|
| 2000～4000（L/min） |
≌3X10-3 Torr |
- E2M175
- Duo125
- VSN1501 / VSN2401
|
| >4000（L/min） |
≌3X10-3 Torr |
|
Low Vacuum：Dry Pump
The ultimate pressure of dry pump is 10-2 Torr. There's no lubricant used during the operation, so there's no worry about contamination. Dry pump is best for applications that requie very clean low vacuum environment, such as semiconductors, display, optoelectronics and so on. We've selected some dry pumps according to their pumping speed for your reference, please see below product information.
| Pumping Speed | Ultimate Pressure | Recommended Models |
|---|
| <100（L/min） |
≌5X10-2 Torr |
|
| 200～300（L/min） |
≌5X10-2 Torr |
- GWSP300
- ISP-250C
- nXDS10i / nXDS15i
|
| 450～600（L/min） |
≌5X10-2 Torr |
|
| 1000（L/min） |
≌5X10-2 Torr |
|
HV-UHV：Turbomolecular Pump
Turbomolecular pump (known as TMP) is widely used in applications that require very celan high vacuum environment, such as surface analysis, SEM, TEM, semiconductors and so on. Unlike entrapment pumps like cryogenic pumps and ion pumps, TMP uses a rapidly spinning fan rotor that hits gas molecules (giving gas molecules momentum) from the inlet of the pump towards the exhaust in order to create or maintain a vacuum, therefore TMP doesn't require regeneration process for maintain its evacuation perfromance and can work continuously. TMP can only be operated via differential pumping in order to protect TMP from being damaged. It's necessary to use rouhging pump (be it mechanical pump or dry pump) to bring down the pressure (approx. 1.0x10-4 Torr) so as to safely activate TMP. We've selected some TMPs according to their pumping speed for your reference, please see below product information.
| Pumping Speed | Ultimate Pressure | Recommended Models |
|---|
| <150（l/s） |
≌5X10-8 Torr |
- TG50F /TG60F /TG70F
- Turbovac50 / Turbovac151
- TurbovacSL80
|
| 200～350（l/s） |
≌1X10-8 Torr |
- TG220F / TG240F
- TG350F / TG390M / TG420M
- SL300 / Turbovac 361/ TW250S
- MAG300 / MAGW400
|
| 450～600（l/s） |
≌1X10-8 Torr |
- TG450F / TW501
- Turbovac 600C
- SL700 / MAGW600
|
| 1000（l/s） |
≌1X10-8 Torr |
- TG900M / TG907M / TG1100F
- Turbovac 1000C / MAGW830
|
| 1000～2000（l/s） |
≌1X10-8 Torr |
- TG1400F /MAGW1300
- TG1300M / TG1307M
- Turbovac T1600 / TW1600
|
| >2000（l/s） |
≌1X10-8 Torr |
- TG2400F/ TG2410F
- TGkine2200M / TG2400M
- TW2401 / MAGW2000
|
HV：Cryogenic Pump
Cryopump is among the line of entrapment pumps. It uses 3 physical mechanism to capture gas molecules inside a vacuum chamber: cryocondensation, cryosorption and cryotrapping. Because of it netrapment nature, a cryogenic pump requires regular regeneration process so as to maintain its evacuating performance. It cannot work continuously like TMP. Despite of this drawback, cryogenic pumping technology is considered the cleanest high vacuum pumping technology. Cryogenic pump is widely used in applications that require very clean high vacuum environment, such as semiconductor, display, optoelectronics, display, solar cell and so on. Like TMP, cryogenic pump can only be operated via differential pumping in order to protect cryo pump from being overloaded. It's necessary to use rouhging pump (be it mechanical pump or dry pump) to bring down the pressure (approx. 1.0x10-4 Torr) so as to safely activate cryogenic pump. We've selected some cryogenic pumps according to their pumping speed for your reference, please see below product information.
| Pumping Speed （Water Vapor L/min） | Pumping Speed （Air L/min） | Recommended Models |
|---|
| <1500（l/s） |
<400（l/s） |
|
| <2500（l/s） |
<700（l/s） |
|
| <5000（l/s） |
<1500（l/s） |
- Cryo-U8H
- On Board 8/8F / Cryo-Torr8/8F
|
| <10000（l/s） |
<2500（l/s） |
- Cryo-U10H / Cryo-U12H
- On Board 10/10F/ Cryo-Torr10
|
| <20000（l/s） |
<5000（l/s） |
- Cryo-U16H
- Cryo-U20H
- On Board 400
- Cryo-Torr20HP
|
