Residual Gas Analyser

rga GP1 rga SRS1

A resigual gas analyser (known as RGA) is a mass filtering device and its working principle is:

  • use hot filament to ionize residual gas molecules in the vacuum chamber
  • use mass filtering technology such as quadrupole or ion trap to further filter out the gas of interest (ionized gas molecules carry specific m/z, by choosing the right filtering voltage, we can filter out the targeted gas ions for analysis)
  • amplify the electrical signal by using electron multiplier for monitoring


RGA has been widely used in applications such as leakage detection, vacuum quality check, process gas monitoring, thermal desorption and so on.  We have both quadrupole-type and ion trap type RGA for customers with different demands:

  • for general gas monitoring, we would recommend quadrupole-type RGA
  • for fast gas screening with high accuracy, we would recommend ion trap type RGA. Please see below product information for more details.

 

SpecSRSMKS VQM
Mass Filter Type
  • Quadrupole
  • Autoresonant Ion Trap
Detector Type
  • Faraday Cup(FC)
  • Electron Multiplier(EM)
  • Electron Multiplier(EM)
Mass Range
  • 1 ~ 100 amu
  • 1 ~ 200 amu
  • 1 ~ 300 amu
  • 1 ~ 145 amu
  • 1 ~ 300 amu
Measurement Range
  • UHV ~ 1 x 10-4 Torr(FC)
  • UHV ~ 1 x 10-6 Torr(EM)
  • UHV ~ 1 x 10-5 Torr
Response Time
  • seconds
  • 1 ~ 145 amu @ 85ms
  • 1 ~ 300 amu @ 120ms