QCM Thickness Monitor
Colnatec is an USA-based manufacturing and has been providing real-time thin film thickness measurement instrument and accessories for years. These products include quartz crystals (AT-type, RC-type and SC-type. All cystrals come with different electrode coating materials for different applications), sensor heads (single-crystal / multi-crystal) and thickness monitor / controller. Colnatec is the first company that takes crystal temperature into account for accurate thickness measurement. Take AT-cut crystal for example, as crystal temperature goes beyond 25°C without proper cooling, the frequency changes becomes nonlinear, causing errors in thickness measurement. Colnatec has developed solutions by incorporating temperature-measuring mechanism to the sensor head, specailly-cut crystals for high temperature applications and special algorithm in thickness monitor /controller. Please see bellow information for more details.
Eon LT Thickness Monitor
Eon-LT is a temperature measuring and film thickness monitor that surpasses conventional monitors that are blind to thermal changes of the crystal. The combination of frequency and temperature measurement allows unprecedented accuracy in real-time rate and film thickness monitoring. Why measure temperature? Because the frequency change of a crystal by process heating can easily be equal to the frequency change caused by coating. In normal operation there is a built-in 10% error in most rate measurements. In the worst case it can be 100%. Why measure if your measurements are always wrong?
Eon-LT Product Features
- Temperature measurement for added precision
- Shutter on/off support (relays)
- Connectivity: RS-232, USB, and WiFi
- Operated using the included, easy-to-use software or controlled via Colnatec’s documented RS232 protocol
- Dual channels for expanded capability
| Spec | Eon LT |
|---|---|
| Appearance |  |
| Frequency Resolution | 0.001 HZ @ 6 MHz (1 Sample per Second) |
| Sample Rate | 100 Hz to 10 Hz |
| Display Update Rate | 10 Hz - 1 Hz |
| Sensor Crystal Frequency | 6 MHz |
| Temperature | 2 sets of type-K TC |
| Sources | 2 sets of 0-5 VDC source controls |
| Relays (non-programmable) | 2 SPST NO for abort & thickness setpoint |
| Communication Protocol | Communication status Power-up status RS-232 |
