Plasma Emission Monitor

novafabrica

 

NovaFabrica is a Lithuania-based manufacturer for multi-channels PMT / CCD plasma emission monitors (PEM). Flotron Series have been designed to monitor real-time plasma emissions and provide close-loop control (PID) for applications such as reactive sputtering, cathodic arc deposition, e-beam deposition, ion-assisted PVD, PEVCD, PEALD and so on. With the use of FloTron in the process, deposition rate, process reproducibility and thin film quality will be greatly improved. Please see below information for more details. 

SpecFloTronFloTron XFloTron HFloTron X HR
Appearance FloTron FloTron X FloTron H FloTron X HR
Output Ports 3, 5 & 9. Depending on model 3, 5 & 9. Depending on model 3, 5 & 9. Depending on model 5
Optical Inputs
  • PMT + filter
  • Inputs: 3, 5 & 9. Depending on model
  • UV-VIS-NIR spectrometer (CCD)
  • Inputs: 1-3. Depending on model
  • PMT + filter
  • Inputs: 1, 3 & 5. Depending on model
  • UV-VIS-NIR spectrometer (CCD)
  • Inputs: bespoke
Spectra Range 200 - 900 nm 190 - (850)1040 nm 190 - (850) 1040 nm 200 - 1100 nm
Spectra Resolution 10 nm 1-6 nm 1-6 nm < 0.5 nm

 

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