Plasma Emission Monitor
NovaFabrica is a Lithuania-based manufacturer for multi-channels PMT / CCD plasma emission monitors (PEM). Flotron Series have been designed to monitor real-time plasma emissions and provide close-loop control (PID) for applications such as reactive sputtering, cathodic arc deposition, e-beam deposition, ion-assisted PVD, PEVCD, PEALD and so on. With the use of FloTron in the process, deposition rate, process reproducibility and thin film quality will be greatly improved. Please see below information for more details.
Spec | FloTron | FloTron X | FloTron H | FloTron X HR |
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Output Ports | 3, 5 & 9. Depending on model | 3, 5 & 9. Depending on model | 3, 5 & 9. Depending on model | 5 |
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Spectra Range | 200 - 900 nm | 190 - (850)1040 nm | 190 - (850) 1040 nm | 200 - 1100 nm |
Spectra Resolution | 10 nm | 1-6 nm | 1-6 nm | < 0.5 nm |
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