Pulsed DC Power Generator

pinn plused DC SPIK3 pulsed dc deposition

Pulsed DC power supply has been designed to provide pulsed high current and energy, which is known to handle arc well (short arc recovery time) , increase sputtering rate and improve thin film quality. Pulsed DC power supply is widely used in reactive sputtering or providing negative bias to substrate. Junsun offers various pulsed DC power supplies for you to choose. For more information, please contact us!

 

SpecPinnacle Single OuputSPIK2000A10SPIK2000A-20SPIK3000A-20
AC Input 200/208 or 400 or 480V 1phase,220V, 50/60Hz 1phase,220V, 50/60Hz 1phase,220V, 50/60Hz
DC Input Power (Average)  5kW 10kW 20kW 20kW
Max. DC Input Voltage 325 to 650V 1000V 1000V 1000V
Max. DC Input Current  15.4A 25A 50A 50A
Arc Suppression  < 5μs 2μs 2μs 2μs
Operation Frequency 5 to 350 KHz, variable ≦50KHz ≦50KHz ≦50KHz
Cooling Capability Air Air+Water Air+Water Air+Water
Water Rate  - ≧3.5L/min ≧3.5L/min ≧8L/min
Water Pressure  - ≧1.5kg/cm2 ≧1.5kg/cm2 ≧6kg/cm2
Water Temperature  - ≦25℃ ≦25℃ ≦25℃
Dimension (mm) 133 mm (H) x 483 mm (W) x 675 mm (D) 356 (H) x 440 (W) x 685 (D) 445 (H) x 440 (W) x 685 (D) 7HE (H) x 440 (W) x 650 (D)
Weight  21.4kg 45kg 70kg 65kg
Interface RS-232, RS-422, RS-485
Profibus
DeviceNet

User (Interlock; PLC) RS232

BNC (External Trigger)
Profibus (Optional)

User (Interlock; PLC) RS232

BNC (External Trigger)
Profibus (Optional)

User (Interlock; PLC) RS232

BNC (External Trigger)
Profibus (Optional)