Microwave Plasma Source



Microwave technology is finding new applications in plasma laboratories and industries due to the advantages of microwave plasmas such as dense plasma–ions, high active species, electrode less (no contamination) and wide working pressure range. Microwave-assisted plasmas find applications in diamond thin film deposition, surface activation, sterilization, synthesis of nanomaterials, gas abatement etc. To meet the ever demanding requirements from the applications, SAIREM has developed its own range of plasma sources and reactors.


SAIREM can offer advice on choosing the plasma equipment and the microwave frequency adapted to your needs; special configurations are also available upon request.