Multi/Single-pocket E-guns
Ferrotec offers electron beam sources in two mounting configurations, conventional (Temescal mount) guns and integrated (Center mount) guns. Temescal guns use the conventional mounting approach, while the integrated guns use an integrated feedthrough to route all connections through the a rotatable center mount with all the fittings positioned outside of the vacuum chamber.
| Spec | Standard Multi-Pocket E-Guns | Integrated Feedthrough Multi-Pocket Guns |
|---|
| Appearance |
 |
 |
| Max. Bakeout tempemperature |
150° C |
150° C |
| Models and Max. Power |
- 1CK: 8 kW
- 2CK: 10 kW
- 3CK: 12 kW
|
- EVM-4: 3 kW
- EVM-6: 6 kW
- EVM-8 : 10 kW
- EVM-10 : 10 kW
|
| Pocket Selection |
- 1CK : 4x7 c.c、6x4c.c
- 2CK : 4x25c.c、6x15c.c、8x7c.c
- 3CK : 4x40c.c、4x60c.c、6x25c.c
|
- EVM-4 : 4x4c.c
- EVM-6 : 4x8c.c、6x4c.c
- EVM-8 : 4x35c.c、6x20c.c、8x12c.c
- EVM-10 : 4x60c.c、6x40c.c、8x20c.c
|
| Acceleration voltage |
4–10 kV |
4–10 kV |
| Max. Operating pressure |
5 x 10-4 Torr |
5 x 10-4 Torr |
| Min. Operating pressure |
1 x 10-8 Torr |
1 x 10-8 Torr |
| Beam deflection |
270° |
270° |
| Filament current |
70 A at 12 V ac |
50 A at 10 V ac |
Pop-Top Multi-pocket E-guns
Temescal’s patented PopTop® e-beam sources offer enhanced convenience, reliability, and throughput in applications ranging from optical and microelectronic production to compound semiconductors and specialized R&D coatings. The key to these performance enhancements is Temescal’s pneumatically actuated “PopTop” crucible cover, which is raised automatically before turret rotation. The net benefit is the virtual elimination of cross-contamination. PopTop® e-beam sources have following features:
- Movable crucible cover, which rises before crucible is rotated
- Pneumatically driven, low-impact cover motion
- Lip of cover recessed around exposed pocket
- Raised structures on underside of cover interlock with crucible web walls
- Virtual elimination of cross-contamination
- Minimal deposition on web walls and on cover margins around exposed pocket
- Reduced risk of damage to source and turret indexer
- Removable/replaceable cover and crucible enable easy source convertibility
- Enhanced crucible cooling improves thermal stability during evaporation
- Adjustable internal and external pole piece extensions optimize beam spot control, regardless of beam position
- Ultra-stable magnetics eliminate the need to regauss magnetic parts following source disassembly
- Power ratings: 1-10 kW (Model 2PT) and 1-12 kW (Model 3PT)
| Comparison | Convention Gun Body | Patented Pop-Top Gun Body |
|---|
| Prevent crucible Jam |
|
|
Ti build up on edge of Top Plate fused with building up on Crucible web wall.
This build up is enough for the Crucible to Jam during rotation to the next pocket. |
Ti evaporated 36um. Build up on web wall only.
No build up on Top Plate and no Jamming. |
| Eliminates cross contamination |
|
|
 |
 |
| Shadows indicating cross-contamination on walls of adjacent pockets |
No evidence of cross-contamination on walls of adjacent pocket |
E-gun Controllers
Ferrotec offers electron beam controllers for use with specific power supply models.
| Spec | EBC | Genius |
|---|
| Appearance |
 |
 |
| Compatibility |
for Temescal CV Series Power Supply |
for FerroTec Carrera Series Power Supply |
| Mounting |
19” Rack mounting |
19” Rack mounting |
| Control |
Touch panel and Hand-held controller |
Hand-held controller |
| Function |
- E-Beam controller
- High voltage power supply controller
- Sweep controller
- Turret controller
|
- E-Beam controller
- High voltage power supply controller
- Sweep controller
- Turret controller
|
| Sweep |
- 8 Amps (+/-4 Amps) with 1024 bit resolution
- 0-200 Hz Frequency Range
- Customized sweep pattern is available
|
- 6 Amps (+/-3 Amps)
- 0-100 Hz Frequency Range
- Customized sweep pattern is available
|
