Thermal Evporation E-beam Evaporation E-beam GLAD Magnetron Sputtering HIPIMS MBE PLD

ALD RF-PECVD Microwave-PECVD

Custom-designed Integrated Glovebox Plasma Treatment

Sputtering Target MBE Cricible E-beam Liner Metal Boats for Thermal Evaporation Vacuum Pump Lubricant Vacuum Sealing Others

E-gun Sputtering Gun MBE K-Cell RF Plasma Source Microwave Plasma Source

DC Power Supply Pulsed DC Power Supply RF Generator Microwave Generator

Vacuum Gauge Mass Flow Controllwe Residual Gas Analyser Helium Leak Detector QCM Thickness Monitor Plasma Emission Minitor

Vacuum Pump Vacuum Valve Feedthrough Magnetic Fluid Transferring Feedthrough Vacuum Chamber and Fittings