Crucible Liners for E-beam Evaporation Process
Liners (inserts) are used in e-beam evaporation process for
- Improve thermal stability
- Reduce heat transfer to the crucible
- Higher evaporation rates
- Enable quick material changes to minimize chamber downtime
- Reduce power requirements
- Minimize crucible damage and maintenancedown crucibles and increase deposition rate
Following are the illustration for liner materials and liner specification.
Liner Materials Illustration
| Liner Material | Illustration |
|---|---|
| Molybdenum | Molybednum is a commonly used liner material due to its physical strength. Please be noted some metals can react with Mo and forming alloys. |
| Tungsten Lanthanated | The physical properties of tungsten lanthanated is very similar with Mo, but tungsten's melting temperature is much higher than Mo. |
| Graphite | Graphite liners made of ATJ-Grade graphite will not react with materials such as Au, Ag, Cu and so on. |
| Poco-Graphite | Liners made of Poco-Graphite, if use for Al evaporation, it can reduce the possiblity of forming aluminum carbide. |