Crucible Liners for E-beam Evaporation Process

Liners (inserts) are used in e-beam evaporation process for

  • Improve thermal stability
  • Reduce heat transfer to the crucible
  • Higher evaporation rates
  • Enable quick material changes to minimize chamber downtime
  • Reduce power requirements
  • Minimize crucible damage and maintenancedown crucibles and increase deposition rate

Following are the illustration for liner materials and liner specification.