真空閥門 Vacuum Valves

俊尚科技提供各式高性能真空閥門,可滿足從低真空到超高真空系統、從小型研發機台到大量產機台上各式需要用到閥門的場合,相關資料請參考下列內容。

SpecGate ValveThrottle valveSlit ValveAngle valve
Apperance direct linear gate valve Throttle Valve slit valve angle valve
General Info
  • For the Isolation between pump and vacuum chamber.
  • Having different options: HV / UHV compatible; nanual / pneumatic operation mode
  • For chamber pressure control
  • Applications: sputtering / plasma-related process
  • For substrate transfer between chambers
  • For different chamber configuration