電漿光譜分析儀 Plasma Emission Monitor

novafabrica

NovaFabrica 是來自立陶宛專業電漿光譜分析儀(Plasma Emission Monitor,PEM)製造商,旗下各款 FloTron 是具備即時監控功能的電漿光譜分析儀,可用於反應性磁控濺鍍、真空電弧、電子束蒸發、IBS、PECVD 及 PEALD 等製程,並可顯著改善這些製程中的鍍膜速率以及製程再現性,對於鍍膜品質及產能提升相當有幫助,是反應式電漿鍍膜應用中相當關鍵的零組件。以下是 NovaFabrica 各款PEM的產品資訊:

SpecFloTronFloTron XFloTron HFloTron X HR
Appearance FloTron FloTron X FloTron H FloTron X HR
Output Ports 3, 5 & 9. Depending on model 3, 5 & 9. Depending on model 3, 5 & 9. Depending on model 5
Optical Inputs
  • PMT + filter
  • Inputs: 3, 5 & 9. Depending on model
  • UV-VIS-NIR spectrometer (CCD)
  • Inputs: 1-3. Depending on model
  • PMT + filter & UV-VIS-NIR spectrometer (CCD)
  • Inputs: 1, 3 & 5. Hybrid, depending on model
  • UV-VIS-NIR spectrometer (CCD)
  • Inputs: 1
Spectra Range 200 - 900 nm 190 - (850)1040 nm 190 - (850) 1040 nm 200 - 1100 nm
Spectra Resolution 10 nm 1-6 nm 1-6 nm 0.1~ 0.5 nm