俊尚科技股份有限公司

微機電-磁性材料脈衝雷射蒸鍍系統

俊尚提供您先進的脈衝雷射蒸鍍系統SMART Nano Tool,SMART Nano Tool 是個非常獨特的多功能研究工具,除了脈衝雷射光系統外,亦可結合與其他薄膜沉積技術,延伸應用領域。

 SVTA SMART 系統外觀    SVTA SMART 系統儀控軟體顯示

系統腔體最多可以配置6個1英吋或是4個2英吋靶材,而為了讓靶材獲致有效利用,除了加入旋轉機構外,所配置之脈衝雷射亦具有掃描功能。此外,為了滿足使用者多樣的需求,俊尚科技亦提供緩衝腔體作為升級套件,讓您的SMART系統可以和與其他真空鍍膜系統或測量系統相連接,在傳輸過程中不會曝露在大氣中;或者也可藉由升級系統套件,獲得超高真空的製程環境,徹底去除系統中可能影響薄膜成分的雜質。透過利用這些出色且細心的設計,您可專注於研究開發而無需憂慮其他繁瑣的細節。

 

Pulsed Laser Plumes—SiO2  Pulsed Laser Plumes—ZnO   Pulsed Laser Plumes— ZnO/MgO

 

SMART NanoTool PLD-01 系統規格

Base System


Chamber and Vacuum Pumps:

  • 12" Quick Access Door, 250l/s Turbo Pump
  • Full Range Vacuum Gauges

Deposition Sources:

  • Target Stage, Six 1" (25 mm) Targets with Rotation and z-Direction Translation

Deposition Stage:

  • 1" (25.4 mm) Sample Size, Heating to 800 °C, Continuous Rotation, z-Direction Translation

In-Situ Process Monitoring Tools:

  • Quartz Crystal Deposition Rate Monitor

 

AUTOMATION


Automation Package:

  • Control Sample Temperature and Rotation
  • Indexed Target Position
  • Target Rotation
  • Gas Control
  • Compute Rate & Thickness using QCM Output
  • Laser Beam Scanning (optional)
  • Laser Interface for Beam Blanking
  • Automated Pumpdown and Venting
  • Differential Pumping
  • RHEED Analysis (optional)
  • Load Lock Pressure Monitoring (optional)

 

Available Options

 

Deposition Sources:

  • Thermal Evaporation Sources, Effusion Cells, Sputter Sources, E-Beam Evaporators, RF Plasma Sources

Deposition Stages:

  • Multiple Options Up to 2" Sample Size

Metrology Tools:

  • 10kV to 30kV RHEED Packages

Vacuum Packages:

  • Ion Pumps, Turbo Pumps, Cryo Pumps, Gate Valves

Gauge Packages:

  • Multiple Gauge Packages Available

Gas Control Packages:

  • Mass Flow and Leak Valve Packages
  • Upstream and Downstream Throttling Control

Loadlock Package:

  • Loadlock, Docking and Transfer Configurations

Ultra High Vacuum:

  • Differential Pumping and System Bakeout Options Available